GAIN 2019
Adsorbate-induced Enhancement of Atomic Layer Etching of Silicon Nitride with Methyl Fluoride
Second Place, Texas Materials Institute Materials Science and Engineering Program 2019 Research Poster Contest.
Adsorbate-induced Enhancement of Atomic Layer Etching of Silicon Nitride with Methyl Fluoride
Second Place, Texas Materials Institute Materials Science and Engineering Program 2019 Research Poster Contest.