First-principles Insight into Non-equilibrium Chemistry in PEALE of Silicon Nitride with Hydrofluorocarbons.
TTCA and L&L Technical Seminar
(invited) Fundamental Understanding of Silicon Nitride ALE from Atomistic Simulations
On the Reactivity of SiN Surfaces Damaged by Ion Bombardment Towards CH3F and CF4 Precursors
Prediction of Chemical Evolution and Its Impact on PEALE of Silicon Nitride with Hydrofluorocarbons