Erik Cheng


email: chenge [at] utexas [dot] edu

I recently earned my PhD in Materials Science and Engineering from The University of Texas at Austin, where I worked in the computational materials lab of Dr. Gyeong Hwang. My research interests lie largely in using data-driven approaches to understand and predict nonequilibrium chemical processes that occur during plasma processing of semiconductor materials.

Previously, I did my undergrad at UC Berkeley, where I obtained a B.S. in Chemistry. At Berkeley, I was an undergraduate researcher in the Saykally group , where I researched the evaporation of aqueous solutions using Raman thermometry. I also developed a keen interest in data science, and was involved in multiple projects through the Berkeley Institute of Data Science . For three semesters (Sp17-Sp18), I was also on course staff for Foundations of Data Science.

In my spare time, I speedcube, boulder, and play Tetris.

You can find a copy of my (possibly) up-to-date CV here.


Mar 30, 2022 Incredibly honored to have been selected as a finalist for the ALE Best Student Paper Award at ALD/ALE 2022! Excited to head to Belgium :smile:
Mar 7, 2022 Pleased to be awarded the Burnt Orange Award (one of the 2 best presentations) at the Graduate and Industry Networking conference
Sep 17, 2021 Excited to present an invited talk on our work unraveling the fundamentals of PEALD of SiN with HFCs at the TTCA and L&L Technical Seminar today!
Jun 30, 2021 Excited to present a specially invited live talk at ALD/ALE 2021! I was also supported by a Professional Development Award from UT Austin.
Dec 11, 2020 Our paper on the dissociative chemisorption of methyl fluoride in PEALE of silicon nitride was published in Applied Surface Science!

selected publications

  1. Appl. Surf. Sci.
    Dissociative chemisorption of methyl fluoride and its implications for atomic layer etching of silicon nitride
    Cheng, Erik S., and Hwang, Gyeong S
    Applied Surface Science 2021
  2. JPCC
    Surprising Effects of Hydrochloric Acid on the Water Evaporation Coefficient Observed by Raman Thermometry
    Rizzuto, Anthony M.,  Cheng, Erik S., Lam, Royce K., and Saykally, Richard J.
    Journal of Physical Chemistry C 2017