talks ALD/ALE 2022 First-principles Insight into Non-equilibrium Chemistry in PEALE of Silicon Nitride with Hydrofluorocarbons. TTCA and L&L Technical Seminar (invited) Fundamental Understanding of Silicon Nitride ALE from Atomistic Simulations ALD/ALE 2021 Structural and Compositional Evolution of SiN Surfaces Under Low Energy Ar+ Bombardment posters ALD/ALE 2021 On the Reactivity of SiN Surfaces Damaged by Ion Bombardment Towards CH3F and CF4 Precursors ALD/ALE 2022 Prediction of Chemical Evolution and Its Impact on PEALE of Silicon Nitride with Hydrofluorocarbons GAIN 2022 Fundamental Understanding of Silicon Nitride PEALE from Atomistic Simulations GAIN 2019 Adsorbate-induced Enhancement of Atomic Layer Etching of Silicon Nitride with Methyl Fluoride
